Al/(S:DLC)/p-Si/Au (MIS) structure-based temperature sensors for moderate and high temperatures at enough high frequencies (0.1, 0.5, and 1 MHz)
E. Balci, Aylar Feizollahi Vahid, Semsettin Altindal
article (Uluslararası, Hakemli) | Yazar(lar): E. Balci, Aylar Feizollahi Vahid, Semsettin Altindal | Yıl: 2025 | Dergi/Kurum: DIAMOND AND RELATED MATERIALS | İndeks: WOS.SCI | DOI: 10.1016/j.diamond.2025.112229 | Anahtar Kelimeler: Capacitance and conductance versus voltage characteristics, Temperature sensing applicat
In this present study, Al/p-Si/Au (MS) structure with Sulphur-doped diamond-like carbon (S:DLC) were fabricated. In order to obtain more information on the electrical parameters and formation natural barrier height (BH) of them, the impedance-voltage-temperature (C/G-V-T) measurements were performed both in wide temperature range of 200-440 K and voltage range of-5 V/+8 V for three different-frequencies (0.1, 0.5, 1 MHz). The C/G-V curves show an anomalous peak especially at moderate and high temperatures. While the peak value inclines with inclining temperature, its position shift towards to negative-voltages due to the rearrangement of the interface-states (Nss) under influence of temperature and electric-field. Some important electrical-parameters like density of NA, Fermi-level (EF), & Vcy;& Ncy;, and thickness of depletion-region (WD) were obtained from the intercept and slope of the C- 2 vs V curve as function of temperature. The voltage dependent distribution of Nss was extracted from the Hill-Coleman and low-high temperature models. The ln(sigma) vs q/kT plot shows to two different linear regions, indicating two-different transmission mechanisms both at lower and higher temperatures. The temperature sensitivity coefficient was also extracted from V vs T plots at 0.7 nF as 29 mV/K at 0.5 MHz and this value shows us that the prepared structures can also be used as temperature sensors.