In Situ Scanning Electron Microscopy of HMDS Converted to NH<sub>3</sub> and Methyl Silanol
Arzu Erol
article (Uluslararası, Hakemli) | Yazar(lar): Arzu Erol | Yıl: 2021 | Dergi/Kurum: SILICON | İndeks: WOS.SCI — Özet: Using SEM and EDX, we observed the conversion of the HMDS molecule to the HMDSO molecule as a result of contact with moisture or water. We prepared the samples by incubating them for 8 to 24 h at room te
Using SEM and EDX, we observed the conversion of the HMDS molecule to the HMDSO molecule as a result of contact with moisture or water. We prepared the samples by incubating them for 8 to 24 h at room temperature in moisture and moisture-free environments. After gradual imaging of the samples, the formation stages of the HMDSO molecule were observed.